Effect of Deposition Angle on the Optical and the StructuralProperties of Ta$_2$O$_5$ Thin Films Fabricated by Using GlancingAngle Deposition

标题
Effect of Deposition Angle on the Optical and the StructuralProperties of Ta$_2$O$_5$ Thin Films Fabricated by Using GlancingAngle Deposition
作者
关键词
-
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 55, Issue 3(2), Pages 1272-1277
出版商
Korean Physical Society
发表日期
2009-09-18
DOI
10.3938/jkps.55.1272

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