Characteristics of Hf-silicate Interfacial Layers Formed by WetEtching

标题
Characteristics of Hf-silicate Interfacial Layers Formed by WetEtching
作者
关键词
-
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 55, Issue 3(1), Pages 1022-1025
出版商
Korean Physical Society
发表日期
2009-09-18
DOI
10.3938/jkps.55.1022

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