Optical Properties and X-ray Photoelectron Spectroscopy Study ofReactive-sputtered Ta-N Thin Films

标题
Optical Properties and X-ray Photoelectron Spectroscopy Study ofReactive-sputtered Ta-N Thin Films
作者
关键词
-
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 55, Issue 3(1), Pages 966-970
出版商
Korean Physical Society
发表日期
2009-09-18
DOI
10.3938/jkps.55.966

向作者/读者发起求助以获取更多资源

Become a Peeref-certified reviewer

The Peeref Institute provides free reviewer training that teaches the core competencies of the academic peer review process.

Get Started

Ask a Question. Answer a Question.

Quickly pose questions to the entire community. Debate answers and get clarity on the most important issues facing researchers.

Get Started