Fabrication and NO2 Sensing Characteristics of an In2O3 Nanowire Gas Sensor

High-quality single-crystalline In2O3 nanowires were synthesized using a gold catalytic vapor-liquid-solid (VLS) process. Single and multi In2O3 nanowire devices were fabricated by using electron beam lithography and photolithography and their current-voltage characteristics were measured after a post process to acquire reproducible devices for possible applications as a chemical gas sensor. The temperature-dependent current-voltage characteristics were measured to investigate the temperature-dependant electrical transport properties for possible applications as a chemical gas sensor. To test the possibility for use as chemical sensor, we measured the NO2 gas response.