Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films

标题
Comparison of the Deposition Characteristics and Electrical Properties for La2O3, HfO2 and LHO Films
作者
关键词
-
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 53, Issue 6, Pages 3334-3337
出版商
Korean Physical Society
发表日期
2009-06-26
DOI
10.3938/jkps.53.3334

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