Microstructure of Intrinsic ZnO Thin Film Grown by Using Atomic Layer Deposition

标题
Microstructure of Intrinsic ZnO Thin Film Grown by Using Atomic Layer Deposition
作者
关键词
-
出版物
JOURNAL OF THE KOREAN PHYSICAL SOCIETY
Volume 53, Issue 9(5), Pages 3033-3037
出版商
Korean Physical Society
发表日期
2009-06-26
DOI
10.3938/jkps.53.3033

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