The Role of Hydroxyethyl Cellulose (HEC) in the Chemical Mechanical Planarization of Copper

标题
The Role of Hydroxyethyl Cellulose (HEC) in the Chemical Mechanical Planarization of Copper
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 159, Issue 3, Pages H329-H334
出版商
The Electrochemical Society
发表日期
2012-01-13
DOI
10.1149/2.060203jes

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