期刊
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
卷 157, 期 2, 页码 G49-G52出版社
ELECTROCHEMICAL SOC INC
DOI: 10.1149/1.3268128
关键词
annealing; bonds (chemical); doping; elemental semiconductors; interface states; lanthanum compounds; nitrogen; semiconductor-insulator boundaries; silicon; vacancies (crystal); X-ray photoelectron spectra
资金
- UGC Competitive Earmarked Research Grant of Hong Kong [CityU 121707]
- Normalized Capacitance Global COE
Recently, both electrical and material properties of lanthanum oxide (La2O3) have been found to significantly improve with a trace amount of nitrogen doping. This work conducted a detailed investigation on the nitrogen incorporation at the La2O3/Si interface by using X-ray photoelectron spectroscopy (XPS) and capacitance-voltage measurements. The process-dependent chemical bonding structures of Si, O, and La atoms at the interface were studied in detail. For samples annealed at 500 degrees C and above, the interfacial metallic La-Si bonds were converted into La-N bonds, and some Si-O bonds were found at the interface. These effects resulted in a significant reduction in the interface trap density. The bulk properties of La2O3 were also improved with the proposed technique as a result of the filling of oxygen vacancies with nitrogen atoms.
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