Copper Fill of Microvia Using a Thiol-Modified Cu Seed Layer and Various Levelers

标题
Copper Fill of Microvia Using a Thiol-Modified Cu Seed Layer and Various Levelers
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 8, Pages D314
出版商
The Electrochemical Society
发表日期
2009-07-08
DOI
10.1149/1.3147273

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