Acceleration Kinetics of PEG, PPG, and a Triblock Copolymer by SPS during Copper Electroplating

标题
Acceleration Kinetics of PEG, PPG, and a Triblock Copolymer by SPS during Copper Electroplating
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 4, Pages D146
出版商
The Electrochemical Society
发表日期
2009-02-25
DOI
10.1149/1.3078405

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