Composition-Dependent Structural and Electrical Properties of Zr[sub x]Ti[sub y]O[sub 2] Films Grown on RuO[sub 2] Substrate by ALD

出版年份 2008 全文链接

标题

Composition-Dependent Structural and Electrical Properties of Zr[sub x]Ti[sub y]O[sub 2] Films Grown on RuO[sub 2] Substrate by ALD

作者

关键词

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出版物

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume 156, Issue 2, Pages G13

出版商

The Electrochemical Society

发表日期

2008-12-23

DOI

10.1149/1.3033500

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