Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO[sub 2]

出版年份 2009 全文链接

标题

Copper Oxide Films Grown by Atomic Layer Deposition from Bis(tri-n-butylphosphane)copper(I)acetylacetonate on Ta, TaN, Ru, and SiO[sub 2]

作者

关键词

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出版物

JOURNAL OF THE ELECTROCHEMICAL SOCIETY

Volume 156, Issue 6, Pages H453

出版商

The Electrochemical Society

发表日期

2009-04-30

DOI

10.1149/1.3110842

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