Study on Atomic Layer Deposition of Amorphous Rhodium Oxide Thin Films

标题
Study on Atomic Layer Deposition of Amorphous Rhodium Oxide Thin Films
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 10, Pages D418
出版商
The Electrochemical Society
发表日期
2009-08-29
DOI
10.1149/1.3190157

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