Impact of Germanium Surface Conditioning and ALD-growth Temperature on Al[sub 2]O[sub 3]/ZrO[sub 2] High-k Dielectric Stacks

标题
Impact of Germanium Surface Conditioning and ALD-growth Temperature on Al[sub 2]O[sub 3]/ZrO[sub 2] High-k Dielectric Stacks
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 10, Pages G168
出版商
The Electrochemical Society
发表日期
2009-08-29
DOI
10.1149/1.3205455

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