Degradation of Atomic Surface Flatness of SiO[sub 2] Thermally Grown on a Si Terrace

标题
Degradation of Atomic Surface Flatness of SiO[sub 2] Thermally Grown on a Si Terrace
作者
关键词
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出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 156, Issue 12, Pages G201
出版商
The Electrochemical Society
发表日期
2009-10-28
DOI
10.1149/1.3236631

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