Characteristics of Hafnium–Zirconium–Oxide Film Treated by Remote Plasma Nitridation

标题
Characteristics of Hafnium–Zirconium–Oxide Film Treated by Remote Plasma Nitridation
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 7, Pages H516
出版商
The Electrochemical Society
发表日期
2008-05-28
DOI
10.1149/1.2917296

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