Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition

标题
Initial Stages of Ruthenium Film Growth in Plasma-Enhanced Atomic Layer Deposition
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 5, Pages H296
出版商
The Electrochemical Society
发表日期
2008-04-08
DOI
10.1149/1.2868779

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