Experimental Study of ALD HfO[sub 2] Deposited on Strained Silicon-on-Insulator and Standard SOI

标题
Experimental Study of ALD HfO[sub 2] Deposited on Strained Silicon-on-Insulator and Standard SOI
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 6, Pages G129
出版商
The Electrochemical Society
发表日期
2008-05-04
DOI
10.1149/1.2898696

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