Cross-Linked Organic Sacrificial Material for Air Gap Formation by Initiated Chemical Vapor Deposition

标题
Cross-Linked Organic Sacrificial Material for Air Gap Formation by Initiated Chemical Vapor Deposition
作者
关键词
-
出版物
JOURNAL OF THE ELECTROCHEMICAL SOCIETY
Volume 155, Issue 4, Pages G78
出版商
The Electrochemical Society
发表日期
2008-03-08
DOI
10.1149/1.2837838

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