期刊
APPLIED PHYSICS LETTERS
卷 106, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4905634
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资金
- IT R&D program of MKE/KEIT [10039174]
We deposited a metal oxide buffer layer before atomic layer deposition (ALD) of Al2O3 onto exfoliated molybdenum disulfide (MoS2) in order to accomplish enhanced integration. We demonstrate that even at a high temperature, functionalization of MoS2 by means of a metal oxide buffer layer can effectively provide nucleation sites for ALD precursors, enabling much better surface coverage of Al2O3. It is shown that using a metal oxide buffer layer not only allows high temperature ALD process, resulting in highly improved quality of Al2O3/MoS2 interface, but also leaves MoS2 intact. (C) 2015 AIP Publishing LLC.
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