Volatile and Thermally Stable Mid to Late Transition Metal Complexes Containing α-Imino Alkoxide Ligands, a New Strongly Reducing Coreagent, and Thermal Atomic Layer Deposition of Ni, Co, Fe, and Cr Metal Films

标题
Volatile and Thermally Stable Mid to Late Transition Metal Complexes Containing α-Imino Alkoxide Ligands, a New Strongly Reducing Coreagent, and Thermal Atomic Layer Deposition of Ni, Co, Fe, and Cr Metal Films
作者
关键词
-
出版物
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY
Volume 135, Issue 34, Pages 12588-12591
出版商
American Chemical Society (ACS)
发表日期
2013-08-15
DOI
10.1021/ja407014w

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