Controlling VUV photon fluxes in low-pressure inductively coupled plasmas

标题
Controlling VUV photon fluxes in low-pressure inductively coupled plasmas
作者
关键词
-
出版物
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 24, Issue 3, Pages 034017
出版商
IOP Publishing
发表日期
2015-06-09
DOI
10.1088/0963-0252/24/3/034017

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