期刊
PLASMA PROCESSES AND POLYMERS
卷 12, 期 11, 页码 1322-1327出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/ppap.201500057
关键词
film outgassing; indium tin oxide; optoelectronic devices; roll-to-roll sputtering; touch screen panel
资金
- Chemical Materials Total Solutions Center Project - Ministry of Trade, Industry, and Energy [M0000511]
- Korea Research Institute of Chemical Technology (KRICT) [KK-1506-C00]
We report the electrical and optical properties of structurally simple refractive-index-matched indium tin oxide (IM-ITO) films prepared on high-refractive index hard-coated polyethylene terephthalate (KM-V2) substrates by using a pilot scale roll to roll magnetron sputtering system for implementation in touch screen panels. We found that the ITO thin films are polycrystalline with a preferred (222) orientation. We determined the appropriate conditions for the deposition of simple-structure IM-ITO films on KM-V2 substrates for touch screen panels with an invisible electrode pattern. Moreover, the outgassing of the polymer substrate is very important in the roll-to-roll sputtering fabrication of high-quality IM-ITO films with the required electrical and optical properties.
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