An XPS depth-profile study on electrochemically deposited TaO x

标题
An XPS depth-profile study on electrochemically deposited TaO x
作者
关键词
Tantalum pentoxide, Ta<sub>2</sub>O<sub>5</sub>, TaO<sub><em class=EmphasisTypeItalic >x</em></sub>, Electrochemical deposition, XPS, Depth profile
出版物
JOURNAL OF SOLID STATE ELECTROCHEMISTRY
Volume 17, Issue 12, Pages 3115-3123
出版商
Springer Nature
发表日期
2013-08-21
DOI
10.1007/s10008-013-2216-y

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