Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature

标题
Charge transport and activation energy of amorphous silicon carbide thin film on quartz at elevated temperature
作者
关键词
-
出版物
Applied Physics Express
Volume 8, Issue 6, Pages 061303
出版商
Japan Society of Applied Physics
发表日期
2015-05-26
DOI
10.7567/apex.8.061303

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