期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 120, 期 3, 页码 811-816出版社
SPRINGER
DOI: 10.1007/s00339-015-9280-3
关键词
-
资金
- European Commission through the FP7-ENERGY Project HERCULES [608498]
- German Federal Ministry of Education and Research (BMBF)
A method for the deposition of molybdenum oxide () with high growth rates at temperatures below 200 based on plasma-enhanced atomic layer deposition is presented. The stoichiometry of the over-stoichiometric films can be adjusted by the plasma parameters. First results of these layers acting as hole-selective contacts in silicon heterojunction solar cells are presented and discussed.
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