Characteristics of lithium phosphorous oxynitride thin films deposited by metal-organic chemical vapor deposition technique

标题
Characteristics of lithium phosphorous oxynitride thin films deposited by metal-organic chemical vapor deposition technique
作者
关键词
-
出版物
JOURNAL OF POWER SOURCES
Volume 244, Issue -, Pages 641-645
出版商
Elsevier BV
发表日期
2013-01-06
DOI
10.1016/j.jpowsour.2012.12.109

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