Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen

标题
Structural and electrical properties of magnetron sputtered Ti(ON) thin films: The case of TiN doped in situ with oxygen
作者
关键词
-
出版物
JOURNAL OF POWER SOURCES
Volume 194, Issue 1, Pages 93-103
出版商
Elsevier BV
发表日期
2009-01-04
DOI
10.1016/j.jpowsour.2008.12.112

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