Spokes in high power impulse magnetron sputtering plasmas

标题
Spokes in high power impulse magnetron sputtering plasmas
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 51, Issue 45, Pages 453001
出版商
IOP Publishing
发表日期
2018-08-16
DOI
10.1088/1361-6463/aadaa1

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