The effect of deposition energy of energetic atoms on the growth and structure of ultrathin amorphous carbon films studied by molecular dynamics simulations

标题
The effect of deposition energy of energetic atoms on the growth and structure of ultrathin amorphous carbon films studied by molecular dynamics simulations
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 24, Pages 245303
出版商
IOP Publishing
发表日期
2014-05-16
DOI
10.1088/0022-3727/47/24/245303

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