Effect of glow DBD modulation on gas and thin film chemical composition: case of Ar/SiH4/NH3mixture

标题
Effect of glow DBD modulation on gas and thin film chemical composition: case of Ar/SiH4/NH3mixture
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 22, Pages 224006
出版商
IOP Publishing
发表日期
2014-05-14
DOI
10.1088/0022-3727/47/22/224006

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