Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure

标题
Adsorption and reactivity of nitrogen atoms on silica surface under plasma exposure
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 47, Pages 475204
出版商
IOP Publishing
发表日期
2014-11-07
DOI
10.1088/0022-3727/47/47/475204

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