Standing wave effect on plasma distribution in an inductively coupled plasma source with a short antenna

标题
Standing wave effect on plasma distribution in an inductively coupled plasma source with a short antenna
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 1, Pages 015205
出版商
IOP Publishing
发表日期
2013-12-05
DOI
10.1088/0022-3727/47/1/015205

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