Quadrupole mass spectrometry of reactive plasmas

标题
Quadrupole mass spectrometry of reactive plasmas
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 40, Pages 403001
出版商
IOP Publishing
发表日期
2012-09-22
DOI
10.1088/0022-3727/45/40/403001

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