A semi-analytic collisionless sheath model for multicomponent plasmas and ion energy and angular distributions at rf-biased electrodes

标题
A semi-analytic collisionless sheath model for multicomponent plasmas and ion energy and angular distributions at rf-biased electrodes
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 46, Issue 2, Pages 025202
出版商
IOP Publishing
发表日期
2012-12-06
DOI
10.1088/0022-3727/46/2/025202

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