Effects of high-temperature O2annealing on Al2O3blocking layer and Al2O3/Si3N4interface for MANOS structures

标题
Effects of high-temperature O2annealing on Al2O3blocking layer and Al2O3/Si3N4interface for MANOS structures
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 18, Pages 185103
出版商
IOP Publishing
发表日期
2012-04-18
DOI
10.1088/0022-3727/45/18/185103

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