Fabrication of pure gold nanostructures by electron beam induced deposition with Au(CO)Cl precursor: deposition characteristics and primary beam scattering effects

标题
Fabrication of pure gold nanostructures by electron beam induced deposition with Au(CO)Cl precursor: deposition characteristics and primary beam scattering effects
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 47, Pages 475301
出版商
IOP Publishing
发表日期
2012-10-30
DOI
10.1088/0022-3727/45/47/475301

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