Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied byin situlaser-light scattering

标题
Synthesis characteristics of Cu particulates in high-pressure magnetron sputtering plasmas studied byin situlaser-light scattering
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 45, Issue 50, Pages 505202
出版商
IOP Publishing
发表日期
2012-11-19
DOI
10.1088/0022-3727/45/50/505202

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