Effects of silicon content on the structure and mechanical properties of (AlCrTaTiZr)–Six–N coatings by reactive RF magnetron sputtering

出版年份 2011 全文链接

标题

作者

关键词

出版物

Volume 44, Issue 20, Pages 205405

出版商

IOP Publishing

发表日期

2011-05-04

DOI

10.1088/0022-3727/44/20/205405

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