Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification

标题
Surface stress-induced deflection of a microcantilever with various widths and overall microcantilever sensitivity enhancement via geometry modification
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 42, Pages 425402
出版商
IOP Publishing
发表日期
2011-10-11
DOI
10.1088/0022-3727/44/42/425402

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