Radical-controlled plasma processing for nanofabrication

标题
Radical-controlled plasma processing for nanofabrication
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 44, Issue 17, Pages 174027
出版商
IOP Publishing
发表日期
2011-04-15
DOI
10.1088/0022-3727/44/17/174027

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