Mechanical anisotropy of nanostructured parylene films during sliding contact

标题
Mechanical anisotropy of nanostructured parylene films during sliding contact
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 43, Issue 4, Pages 045403
出版商
IOP Publishing
发表日期
2010-01-13
DOI
10.1088/0022-3727/43/4/045403

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