Substantial Doppler broadening of atomic-hydrogen lines in dc and capacitively coupled RF plasmas

标题
Substantial Doppler broadening of atomic-hydrogen lines in dc and capacitively coupled RF plasmas
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 42, Issue 13, Pages 135207
出版商
IOP Publishing
发表日期
2009-06-17
DOI
10.1088/0022-3727/42/13/135207

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