Physical and electrical characterization of atomic-layer-deposited Ru nanocrystals embedded into Al2O3 for memory applications

出版年份 2008 全文链接

标题

Physical and electrical characterization of atomic-layer-deposited Ru nanocrystals embedded into Al2O3 for memory applications

作者

关键词

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出版物

JOURNAL OF PHYSICS D-APPLIED PHYSICS

Volume 41, Issue 3, Pages 032007

出版商

IOP Publishing

发表日期

2008-01-09

DOI

10.1088/0022-3727/41/3/032007

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