Dynamics of a pulsed-electron beam induced plasma: application to the growth of zinc oxide thin films

标题
Dynamics of a pulsed-electron beam induced plasma: application to the growth of zinc oxide thin films
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 17, Pages 175205
出版商
IOP Publishing
发表日期
2008-08-13
DOI
10.1088/0022-3727/41/17/175205

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