Dynamical properties of acoustic emission by anomalous discharge in plasma processing system

标题
Dynamical properties of acoustic emission by anomalous discharge in plasma processing system
作者
关键词
-
出版物
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 41, Issue 3, Pages 035209
出版商
IOP Publishing
发表日期
2008-01-17
DOI
10.1088/0022-3727/41/3/035209

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