Effects of Chlorine in Titanium Oxide on Palladium Atomic Layer Deposition

标题
Effects of Chlorine in Titanium Oxide on Palladium Atomic Layer Deposition
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 118, Issue 39, Pages 22611-22619
出版商
American Chemical Society (ACS)
发表日期
2014-09-05
DOI
10.1021/jp5067567

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