Surface Pseudorotation in Lewis-Base-Catalyzed Atomic Layer Deposition of SiO2: Static Transition State Search and Born–Oppenheimer Molecular Dynamics Simulation

标题
Surface Pseudorotation in Lewis-Base-Catalyzed Atomic Layer Deposition of SiO2: Static Transition State Search and Born–Oppenheimer Molecular Dynamics Simulation
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 116, Issue 50, Pages 26436-26448
出版商
American Chemical Society (ACS)
发表日期
2012-11-27
DOI
10.1021/jp309974r

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