Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates

标题
Examination of Etching Agent and Etching Mechanism on Femotosecond Laser Microfabrication of Channels Inside Vitreous Silica Substrates
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 113, Issue 27, Pages 11560-11566
出版商
American Chemical Society (ACS)
发表日期
2009-04-23
DOI
10.1021/jp900915r

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