Growth of Noble Metal Ru Thin Films by Liquid Injection Atomic Layer Deposition

标题
Growth of Noble Metal Ru Thin Films by Liquid Injection Atomic Layer Deposition
作者
关键词
-
出版物
Journal of Physical Chemistry C
Volume 113, Issue 26, Pages 11329-11335
出版商
American Chemical Society (ACS)
发表日期
2009-06-11
DOI
10.1021/jp9021882

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